The company has filed documents with the Texas Department of Licensing and Regulation for data centres totalling over 300,000 sq ft.
The buildings will be built in three phases at 3545 Wiseman Boulevard with work on the first phase due to begin in October 2021 and finish in December 2022.
This phase takes up the lion's share of the space planned and the cost - valued at $155 million.
Phase two will be completed in June 2024 at a cost of $27 million. Microsoft bought the land for the campus last year.
Microsoft already has Azure availability zones in the state, and it opened a dedicated US government data centre region for Texas in 2017.
The firm also has plans to build data centres on land it owns at the Texas Research Park in San Antonio.
Cloud services rival Amazon Web Services has plans to open further data centres in San Antonio too.
